美国HONEYWELL，MIDAS-E-XHF，NF3，三氟化氮
美国HONEYWELL，MIDAS-E-XHF，NF3，三氟化氮
美国HONEYWELL，MIDAS-E-XHF，NF3，三氟化氮
Midas®
SENSOR CARTRIDGE SPECIFICATIONS
3 and Methyl Fluoride CH3F
Midas-S-XHF, Midas-E-XHF
Find out more
www.honeywellanalytics.com
Toll-free: 800.538.0363
Please Note:
While every effort has been made to ensure accuracy in this publication, no responsibility can be accepted for errors or omissions.
Data may change, as well as legislation, and you are strongly advised to obtain copies of the most recently issued regulations,
standards, and guidelines. This publication is not intended to form the basis of a contract.
SS01115K_v5 11/19
© 2019 Honeywell Analytics
Cross Sensitivities
Each Midas® sensor is potentially cross sensitive to other gases and
this may cause a gas reading when exposed to other gases than
those originally designated. The table below presents typical readings
that will be observed when a new sensor cartridge is exposed to
the cross sensitive gas (or a mixture of gases containing the cross
sensitive species).
Gas / Vapor Chemical Concentration Reading
Formula applied (ppm) (ppm NF3)
Arsine AsH3 1 0
Carbon Monoxide CO 2000 0
Chlorine Cl2 5 34.5
Diborane B2
H6 1 -1.3
Hydrogen H2 20000 0
Hydrogen Chloride HCl 8 14
Hydrogen Flouride HF 2 9.2
Hydrogen Sulphide H2
S 25 -3.6
Iso Propanol C3
H7
OH 500 0
Methanol CH3
OH 500 0
Nitrogen Dioxide NO2 5 2.6
Phosphine PH3 1 -0.14
Sulphur Dioxide SO2 10 22.8
Interference differs from cartridge to cartridge and over cell life. It is not recommended to
calibrate with cross sensitivity factors. The target gas should be used for calibration.
Detectable Gas Chemical Formula Measuring Range
Methyl Fluoride CH3F 0 – 120ppm
Other Detectable Gases
The following additional gases can be detected with this sensor
cartridge. Sensor performance and characteristics will be
representative of the data as tabulated above. Consult the Technical
Manual to set up the Midas® transmitter with the designated
identification code for each of the following gas types.
Gas Measured Nitrogen Trifluoride (NF3)
Cartridge Part Number MIDAS-S-XHF 1 year standard warranty
MIDAS-E-XHF 2 year extended warranty
Sensor Technology 3 electrode electrochemical cell
Measuring Range (ppm) NF3 0 - 40 ppm
Minimum Alarm 1 Set Point 4.0ppm
Repeatability < ± 10% of measured value
Linearity < ± 20% of measured value
Response Time t 62.5 < 110 seconds
Sensor Cartridge Life Expectancy ≥ 24 months under typical application conditions
Operating Temperature 0°C to +40°C (32°F to 104°F)
Effect of Temperature < ± 0.002ppm / °C (at 0°C to 20°C)
Zero < ± 0.008ppm / °C (at 20°C to 40°C)
Sensitivity < ± 0.4% of measured value / °C
Operating Humidity (continuous) 20 – 75% rH 1
Effect of Humidity
Zero < ± 0.003ppm / % rH
Sensitivity < ± 1% of measured value / % rH
Operating Pressure 90 - 110kPa
Effect of Position No effect in typical application
Long Term Drift
Zero No drift
Sensitivity < 15% of measured value / year
Calibration Gas Hydrogen Fluroide (HF)
Challenge Gas (Bump Test) Chlorine (Cl2 )
Warm Up Time < 20 minutes
Storage Temperature +5°C to +25°C (+41°F to +77°F)
The sensor data listed is based on ideal test environment; observed performance may vary based on
the actual monitoring system and the sampling conditions employed.
Separate Pyrolyzer module (MIDAS-T-NP1) required with the Nitrogen Triflouride sensor cartridge to
detect
gas calibration every 6 months, and ensure the constant temperature of the installation point is in
NF3 by thermal breakdown. To maintain stated performance, it is recommended to perform
50 – 104ºF(10 - 40ºC) and the humidity is in 30 – 70 %RH.
Otherwise, more frequent bump testing or callibration will be required to confirm working specifications
